%0 Journal Article
%A Oyoshi, A. N.
%A Lenssen, D.
%A Carius, R.
%A Mantl, S.
%T Study of structure and optical properties of beta-FeSi2 precipitates formed by ion-implantation of Fe+ in Si (100) and effect of co-implantation of Fe+  and Si+ in amorphous SiO2
%J Thin solid films
%V 381
%@ 0040-6090
%C Amsterdam [u.a.]
%I Elsevier
%M PreJuSER-40799
%P 194 - 201
%D 2001
%Z Record converted from VDB: 12.11.2012
%F PUB:(DE-HGF)16
%9 Journal Article
%U https://juser.fz-juelich.de/record/40799