TY  - JOUR
AU  - Oyoshi, A. N.
AU  - Lenssen, D.
AU  - Carius, R.
AU  - Mantl, S.
TI  - Study of structure and optical properties of beta-FeSi2 precipitates formed by ion-implantation of Fe+ in Si (100) and effect of co-implantation of Fe+  and Si+ in amorphous SiO2
JO  - Thin solid films
VL  - 381
SN  - 0040-6090
CY  - Amsterdam [u.a.]
PB  - Elsevier
M1  - PreJuSER-40799
SP  - 194 - 201
PY  - 2001
N1  - Record converted from VDB: 12.11.2012
LB  - PUB:(DE-HGF)16
UR  - https://juser.fz-juelich.de/record/40799
ER  -