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@ARTICLE{Oyoshi:40799,
author = {Oyoshi, A. N. and Lenssen, D. and Carius, R. and Mantl, S.},
title = {{S}tudy of structure and optical properties of
beta-{F}e{S}i2 precipitates formed by ion-implantation of
{F}e+ in {S}i (100) and effect of co-implantation of {F}e+
and {S}i+ in amorphous {S}i{O}2},
journal = {Thin solid films},
volume = {381},
issn = {0040-6090},
address = {Amsterdam [u.a.]},
publisher = {Elsevier},
reportid = {PreJuSER-40799},
pages = {194 - 201},
year = {2001},
note = {Record converted from VDB: 12.11.2012},
cin = {IPV / ISG-1},
ddc = {070},
cid = {I:(DE-Juel1)VDB46 / I:(DE-Juel1)VDB41},
pnm = {Grundlagen und Technologie von Dünnschichtsolarzellen /
Ionentechnik},
pid = {G:(DE-Juel1)FUEK70 / G:(DE-Juel1)FUEK67},
typ = {PUB:(DE-HGF)16},
url = {https://juser.fz-juelich.de/record/40799},
}