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| 024 | 7 | _ | |a 0040-6090 |2 ISSN |
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| 100 | 1 | _ | |a Oyoshi, A. N. |0 P:(DE-Juel1)VDB5788 |b 0 |u FZJ |
| 245 | _ | _ | |a Study of structure and optical properties of beta-FeSi2 precipitates formed by ion-implantation of Fe+ in Si (100) and effect of co-implantation of Fe+ and Si+ in amorphous SiO2 |
| 260 | _ | _ | |a Amsterdam [u.a.] |b Elsevier |c 2001 |
| 300 | _ | _ | |a 194 - 201 |
| 336 | 7 | _ | |a Journal Article |0 PUB:(DE-HGF)16 |2 PUB:(DE-HGF) |
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| 440 | _ | 0 | |a Thin Solid Films |x 0040-6090 |0 5762 |v 381 |
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