%0 Journal Article
%A Baunemann, A.
%A Becker, R.
%A Winter, M.
%A Fischer, R. A.
%A Thomas, R.
%A Ehrhart, P.
%A Waser, R.
%A Devi, A.
%T Mononuclear precursor for MOCVD of HfO2 thin films
%J Chemical communications
%@ 1359-7345
%C Cambridge
%I Soc.
%M PreJuSER-41146
%P 1610 - 1611
%D 2004
%Z Record converted from VDB: 12.11.2012
%X We report the precursor characteristics of a novel mononuclear mixed alkoxide compound [Hf(O(i)Pr)2(tbaoac)2] and its application towards MOCVD of HfO2 thin films in a production tool CVD reactor.
%K J (WoSType)
%F PUB:(DE-HGF)16
%9 Journal Article
%$ pmid:15263942
%U <Go to ISI:>//WOS:000223241000019
%R 10.1039/b405015k
%U https://juser.fz-juelich.de/record/41146