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000041146 084__ $$2WoS$$aChemistry, Multidisciplinary
000041146 1001_ $$0P:(DE-HGF)0$$aBaunemann, A.$$b0
000041146 245__ $$aMononuclear precursor for MOCVD of HfO2 thin films
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000041146 520__ $$aWe report the precursor characteristics of a novel mononuclear mixed alkoxide compound [Hf(O(i)Pr)2(tbaoac)2] and its application towards MOCVD of HfO2 thin films in a production tool CVD reactor.
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