TY  - JOUR
AU  - Baunemann, A.
AU  - Becker, R.
AU  - Winter, M.
AU  - Fischer, R. A.
AU  - Thomas, R.
AU  - Ehrhart, P.
AU  - Waser, R.
AU  - Devi, A.
TI  - Mononuclear precursor for MOCVD of HfO2 thin films
JO  - Chemical communications
SN  - 1359-7345
CY  - Cambridge
PB  - Soc.
M1  - PreJuSER-41146
SP  - 1610 - 1611
PY  - 2004
N1  - Record converted from VDB: 12.11.2012
AB  - We report the precursor characteristics of a novel mononuclear mixed alkoxide compound [Hf(O(i)Pr)2(tbaoac)2] and its application towards MOCVD of HfO2 thin films in a production tool CVD reactor.
KW  - J (WoSType)
LB  - PUB:(DE-HGF)16
C6  - pmid:15263942
UR  - <Go to ISI:>//WOS:000223241000019
DO  - DOI:10.1039/b405015k
UR  - https://juser.fz-juelich.de/record/41146
ER  -