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@ARTICLE{Baunemann:41146,
      author       = {Baunemann, A. and Becker, R. and Winter, M. and Fischer, R.
                      A. and Thomas, R. and Ehrhart, P. and Waser, R. and Devi,
                      A.},
      title        = {{M}ononuclear precursor for {MOCVD} of {H}f{O}2 thin films},
      journal      = {Chemical communications},
      issn         = {1359-7345},
      address      = {Cambridge},
      publisher    = {Soc.},
      reportid     = {PreJuSER-41146},
      pages        = {1610 - 1611},
      year         = {2004},
      note         = {Record converted from VDB: 12.11.2012},
      abstract     = {We report the precursor characteristics of a novel
                      mononuclear mixed alkoxide compound [Hf(O(i)Pr)2(tbaoac)2]
                      and its application towards MOCVD of HfO2 thin films in a
                      production tool CVD reactor.},
      keywords     = {J (WoSType)},
      cin          = {CNI / IFF-IEM},
      ddc          = {540},
      cid          = {I:(DE-Juel1)VDB381 / I:(DE-Juel1)VDB321},
      pnm          = {Materialien, Prozesse und Bauelemente für die Mikro- und
                      Nanoelektronik},
      pid          = {G:(DE-Juel1)FUEK252},
      shelfmark    = {Chemistry, Multidisciplinary},
      typ          = {PUB:(DE-HGF)16},
      pubmed       = {pmid:15263942},
      UT           = {WOS:000223241000019},
      doi          = {10.1039/b405015k},
      url          = {https://juser.fz-juelich.de/record/41146},
}