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%0 Conference Paper %A Roschek, T. %A Rech, B. %A Beyer, W. %A Werner, P. %A Edelman, F. %A Chack, A. %A Weil, R. %A Beserman, R. %T Microcrystalline silicon solar cells prepared by 13.56 Mhz PECVD at high growth rates : solar cell and material properties %M PreJuSER-41357 %D 2001 %Z Record converted from VDB: 12.11.2012 %< MRS Spring Meeting Y2 16 Apr 2001 M2 San Francisco, Calif., %F PUB:(DE-HGF)24 %9 Poster %U https://juser.fz-juelich.de/record/41357