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TY - CONF AU - Roschek, T. AU - Rech, B. AU - Beyer, W. AU - Werner, P. AU - Edelman, F. AU - Chack, A. AU - Weil, R. AU - Beserman, R. TI - Microcrystalline silicon solar cells prepared by 13.56 Mhz PECVD at high growth rates : solar cell and material properties M1 - PreJuSER-41357 PY - 2001 N1 - Record converted from VDB: 12.11.2012 Y2 - 16 Apr 2001 M2 - San Francisco, Calif., LB - PUB:(DE-HGF)24 UR - https://juser.fz-juelich.de/record/41357 ER -