TY  - CONF
AU  - Roschek, T.
AU  - Rech, B.
AU  - Beyer, W.
AU  - Werner, P.
AU  - Edelman, F.
AU  - Chack, A.
AU  - Weil, R.
AU  - Beserman, R.
TI  - Microcrystalline silicon solar cells prepared by 13.56 Mhz PECVD at high growth rates : solar cell and material properties
M1  - PreJuSER-41357
PY  - 2001
N1  - Record converted from VDB: 12.11.2012
Y2  - 16 Apr 2001
M2  - San Francisco, Calif., 
LB  - PUB:(DE-HGF)24
UR  - https://juser.fz-juelich.de/record/41357
ER  -