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@PHDTHESIS{Linke:41884,
      author       = {Linke, Felix},
      title        = {{D}evelopment of {E}llipsometric {M}icroscopy as a
                      {Q}uantitative {H}igh-{R}esolution {T}echnique for the
                      {I}nvestigation of {T}hin {F}ilms at {G}lass-{W}ater and
                      {S}ilicon-{A}ir {I}nterfaces},
      volume       = {23},
      school       = {Technische Universität München},
      type         = {Dr. (Univ.)},
      address      = {Jülich},
      publisher    = {Forschungszentrum Jülich Gmbh Zentralbibliothek, Verlag},
      reportid     = {PreJuSER-41884},
      isbn         = {3-89336-373-4},
      series       = {Schriften des Forschungszentrums Jülich. Reihe Materie und
                      Material/Matter and Materials},
      pages        = {133 S.},
      year         = {2004},
      note         = {Record converted from VDB: 12.11.2012; Technische
                      Universität München, Diss., 2004},
      abstract     = {The presented work deals with ellipsometric microscopy, an
                      optical technique for the investigation of thin films.
                      Ellipsometric microscopy combines two powerful optical
                      techniques, microscopy and ellipsometry. The latter
                      technique exploits the fact that the state of polarization
                      of light changes in a well known way upon reflection at
                      interfaces covered by thin films. Ellipsometry is a very
                      accurate technique for simultaneously measuring thin film
                      thickness and refractive index or extinction coefficient.
                      Its main drawback is poor lateral resolution which is
                      overcome in ellipsometric microscopy. The basic idea of
                      ellipsometric microscopy had been proposed before and its
                      feasibility was shown. The aims of this thesis were twofold.
                      On the one hand, ellipsometric microscopy was to be
                      converted from a qualitative technique into a reliable and
                      quantitative method. On the other hand, the technique had to
                      be improved to a point were the glass-water interface could
                      be investigated for biophysical questions. These goals
                      proved to be very demanding because interpreting
                      ellipsometric data requires an exact control over the angle
                      of incidence and the polarization of light. However, in
                      microscopy it is necessary to use cones of light with
                      opening angles as large as possible. Finding the best
                      balance between these conflicting demands and interpreting
                      the ellipsometric data accurately required careful
                      theoretical analysis and very substantial improvements of
                      the setup. The former setup was converted into a
                      fully-fledged ellipsometric device. All optical and
                      optoelectronic parts and most opto-mechanical parts of the
                      setup were changed and optimized for the specific demands of
                      the technique. Moreover, approaches for accurate alignment
                      and calibration known from ellipsometry were adapted to
                      ellipsometric microscopy. Zone averaging was implemented for
                      systematic cancellation of remaining experimental
                      uncertainties to first order. In order to enable
                      quantitative experiments it was important to analyze and
                      correct imperfections of the utilized CCD camera. However,
                      the most important issue was to correct for the influence of
                      the imaging optics on the ellipsometric data. This was
                      solved by describing the optical components as part of the
                      sample, i.e. they were modeled to contribute their own
                      ellipsometric angles $\Delta$ and $\Psi$. The validity of
                      this model and the performance of the improved setup were
                      verified experimentally in the full domain of the
                      ellipsometric angles $\Psi \in$ [0$^{\circ}$,90$^{\circ}$[
                      and $\Delta \in$ [0$^{\circ}$,360$^{\circ}$[ by systematic
                      measurements on calibrated objects . These were silicon
                      substrates coated with carefully controlled thin layers of
                      MgF$_{2}$ and ZnS . To the best of my knowledge neither this
                      nor any other approach for correcting the influence of the
                      imaging optics on the ellipsometric data was described
                      before. [...]},
      cin          = {ISG-4},
      ddc          = {500},
      cid          = {I:(DE-Juel1)VDB44},
      pnm          = {Kondensierte Materie},
      pid          = {G:(DE-Juel1)FUEK242},
      typ          = {PUB:(DE-HGF)11 / PUB:(DE-HGF)3},
      url          = {https://juser.fz-juelich.de/record/41884},
}