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@ARTICLE{Schwartz:43113,
      author       = {Schwartz, R. W. and Schneller, T. and Waser, R.},
      title        = {{C}hemical solution deposition of electronic oxide films},
      journal      = {Comptes rendus chimie},
      volume       = {7},
      issn         = {1631-0748},
      address      = {Paris},
      publisher    = {Elsevier},
      reportid     = {PreJuSER-43113},
      pages        = {433},
      year         = {2004},
      note         = {Record converted from VDB: 12.11.2012},
      abstract     = {The chemical solution deposition (CSD) technique as a
                      highly flexible method for the fabrication of electronic
                      oxide thin films is reviewed. Various chemical aspects of
                      different approaches are discussed, including sol-gel,
                      hybrid, and metallo-organic decomposition (MOD) routes,
                      which all have been successfully applied for the deposition
                      of this class of materials. Principles of the selection and
                      properties of the educts, the mechanism of film
                      crystallization, and tailoring of microstructure through
                      manipulation of deposition parameters are reported. The role
                      of thermodynamics on the phase transformation process is
                      also reviewed. Finally, some of the applications for
                      chemical solution-derived thin films currently under
                      development are illustrated, and recent advances, such as
                      the deposition of less than 100-nm-thick films, lateral
                      nanostructuring, and the formation of single nano-sized
                      grains are considered. (C) 2004 Academie des sciences.
                      Published by Elsevier SAS. All rights reserved.},
      keywords     = {J (WoSType)},
      cin          = {IFF-IEM},
      ddc          = {540},
      cid          = {I:(DE-Juel1)VDB321},
      pnm          = {Materialien, Prozesse und Bauelemente für die Mikro- und
                      Nanoelektronik},
      pid          = {G:(DE-Juel1)FUEK252},
      shelfmark    = {Chemistry, Multidisciplinary},
      typ          = {PUB:(DE-HGF)16},
      UT           = {WOS:000222224500002},
      doi          = {10.1016/j.crci.2004.01.007},
      url          = {https://juser.fz-juelich.de/record/43113},
}