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@ARTICLE{Gerber:43114,
      author       = {Gerber, P. and Roelofs, A. and Kügeler, C. and Böttger,
                      U. and Waser, R. and Prume, K.},
      title        = {{E}ffects of the top-electode size on the piezoelectric
                      properties (d(sub33) and {S}) of lead zirconate titanate
                      thin films},
      journal      = {Journal of applied physics},
      volume       = {96},
      issn         = {0021-8979},
      address      = {Melville, NY},
      publisher    = {American Institute of Physics},
      reportid     = {PreJuSER-43114},
      pages        = {2800 - 2804},
      year         = {2004},
      note         = {Record converted from VDB: 12.11.2012},
      abstract     = {The effects of a decreasing top electrode size on the
                      electric and piezoelectric properties of tetragonal Pb(Zr-X,
                      Ti1-X)O-3 thin films are investigated. The effective
                      piezoelectric small-signal coefficient d(33,eff) and the
                      piezoelectric large signal-strain S are measured using a
                      double-beam laser interferometer. Both properties are found
                      to decrease rapidly with decreasing size of the used Pt top
                      electrode for the investigated dimensions of 5 mm to 100 mum
                      edge length (square pads). While the loss of d(33,eff) is as
                      high as $75\%,$ the influence on the relative permittivity
                      is only small. The source of the pad size effect on the
                      measured piezoelectric properties is found to be the
                      mechanics of the layered structure commonly used for
                      piezoelectric measurements (Pt/PZT/Pt/TiO/SiO2/Si), [PZT,
                      Pb(Zr-x, Ti1-x)O-3] which is verified by finite element
                      simulations. (C) 2004 American Institute of Physics.},
      keywords     = {J (WoSType)},
      cin          = {IFF-IEM / CNI},
      ddc          = {530},
      cid          = {I:(DE-Juel1)VDB321 / I:(DE-Juel1)VDB381},
      pnm          = {Materialien, Prozesse und Bauelemente für die Mikro- und
                      Nanoelektronik},
      pid          = {G:(DE-Juel1)FUEK252},
      shelfmark    = {Physics, Applied},
      typ          = {PUB:(DE-HGF)16},
      UT           = {WOS:000223719300055},
      doi          = {10.1063/1.1775306},
      url          = {https://juser.fz-juelich.de/record/43114},
}