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000043472 084__ $$2WoS$$aChemistry, Physical
000043472 084__ $$2WoS$$aMaterials Science, Coatings & Films
000043472 084__ $$2WoS$$aPhysics, Applied
000043472 084__ $$2WoS$$aPhysics, Condensed Matter
000043472 1001_ $$0P:(DE-HGF)0$$aFujihara, S.$$b0
000043472 245__ $$aInterfacial reactions and microstructure of BaTiO3 films prepared using fluorideprecursor method
000043472 260__ $$aAmsterdam$$bNorth-Holland$$c2004
000043472 300__ $$a178 - 183
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000043472 440_0 $$0573$$aApplied Surface Science$$v221$$x0169-4332
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000043472 520__ $$aInterfacial reactions of BaF2 and TiO2 were investigated in preparing BaTiO3 thin films using a fluoride precursor method. Trifluoroacetate solutions were prepared from barium acetate, titanium tetraisopropoxide (TTIP), and trifluoroacetic acid (TFA, CF3COOH) with additives such as water and acetylacetone. The solutions were deposited on platinized Si wafers by spin-coating, were pyrolysed at 400 degreesC in air and were finally heated typically at 700 degreesC in a water vapor atmosphere. The perovskite BaTiO3 phase was obtained although a small portion of BaF2 remained unreacted. Thus, the films were characterized as the mixture of BaTiO3, BaF2, and amorphous TiO2. Influence of the solution chemistry on the phase evolution and microstructure was examined in order to discuss the reaction pathway of the perovskite phase. (C) 2003 Elsevier B.V. All rights reserved.
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000043472 65320 $$2Author$$abarium titanate
000043472 65320 $$2Author$$abarium fluoride
000043472 65320 $$2Author$$asol-gel
000043472 65320 $$2Author$$athin film
000043472 7001_ $$0P:(DE-HGF)0$$aSchneller, T.$$b1
000043472 7001_ $$0P:(DE-Juel1)131022$$aWaser, R.$$b2$$uFZJ
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000043472 8567_ $$uhttp://dx.doi.org/10.1016/S0169-4332(03)00869-9
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000043472 9141_ $$y2004
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