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| 001 | 43472 | ||
| 005 | 20180210141322.0 | ||
| 024 | 7 | _ | |2 DOI |a 10.1016/S0169-4332(03)00869-9 |
| 024 | 7 | _ | |2 WOS |a WOS:000187721700026 |
| 037 | _ | _ | |a PreJuSER-43472 |
| 041 | _ | _ | |a eng |
| 082 | _ | _ | |a 670 |
| 084 | _ | _ | |2 WoS |a Chemistry, Physical |
| 084 | _ | _ | |2 WoS |a Materials Science, Coatings & Films |
| 084 | _ | _ | |2 WoS |a Physics, Applied |
| 084 | _ | _ | |2 WoS |a Physics, Condensed Matter |
| 100 | 1 | _ | |a Fujihara, S. |b 0 |0 P:(DE-HGF)0 |
| 245 | _ | _ | |a Interfacial reactions and microstructure of BaTiO3 films prepared using fluorideprecursor method |
| 260 | _ | _ | |a Amsterdam |b North-Holland |c 2004 |
| 300 | _ | _ | |a 178 - 183 |
| 336 | 7 | _ | |a Journal Article |0 PUB:(DE-HGF)16 |2 PUB:(DE-HGF) |
| 336 | 7 | _ | |a Output Types/Journal article |2 DataCite |
| 336 | 7 | _ | |a Journal Article |0 0 |2 EndNote |
| 336 | 7 | _ | |a ARTICLE |2 BibTeX |
| 336 | 7 | _ | |a JOURNAL_ARTICLE |2 ORCID |
| 336 | 7 | _ | |a article |2 DRIVER |
| 440 | _ | 0 | |a Applied Surface Science |x 0169-4332 |0 573 |v 221 |
| 500 | _ | _ | |a Record converted from VDB: 12.11.2012 |
| 520 | _ | _ | |a Interfacial reactions of BaF2 and TiO2 were investigated in preparing BaTiO3 thin films using a fluoride precursor method. Trifluoroacetate solutions were prepared from barium acetate, titanium tetraisopropoxide (TTIP), and trifluoroacetic acid (TFA, CF3COOH) with additives such as water and acetylacetone. The solutions were deposited on platinized Si wafers by spin-coating, were pyrolysed at 400 degreesC in air and were finally heated typically at 700 degreesC in a water vapor atmosphere. The perovskite BaTiO3 phase was obtained although a small portion of BaF2 remained unreacted. Thus, the films were characterized as the mixture of BaTiO3, BaF2, and amorphous TiO2. Influence of the solution chemistry on the phase evolution and microstructure was examined in order to discuss the reaction pathway of the perovskite phase. (C) 2003 Elsevier B.V. All rights reserved. |
| 536 | _ | _ | |a Materialien, Prozesse und Bauelemente für die Mikro- und Nanoelektronik |c I01 |2 G:(DE-HGF) |0 G:(DE-Juel1)FUEK252 |x 0 |
| 588 | _ | _ | |a Dataset connected to Web of Science |
| 650 | _ | 7 | |a J |2 WoSType |
| 653 | 2 | 0 | |2 Author |a barium titanate |
| 653 | 2 | 0 | |2 Author |a barium fluoride |
| 653 | 2 | 0 | |2 Author |a sol-gel |
| 653 | 2 | 0 | |2 Author |a thin film |
| 700 | 1 | _ | |a Schneller, T. |b 1 |0 P:(DE-HGF)0 |
| 700 | 1 | _ | |a Waser, R. |b 2 |u FZJ |0 P:(DE-Juel1)131022 |
| 773 | _ | _ | |a 10.1016/S0169-4332(03)00869-9 |g Vol. 221, p. 178 - 183 |p 178 - 183 |q 221<178 - 183 |0 PERI:(DE-600)2002520-8 |t Applied surface science |v 221 |y 2004 |x 0169-4332 |
| 856 | 7 | _ | |u http://dx.doi.org/10.1016/S0169-4332(03)00869-9 |
| 909 | C | O | |o oai:juser.fz-juelich.de:43472 |p VDB |
| 913 | 1 | _ | |k I01 |v Materialien, Prozesse und Bauelemente für die Mikro- und Nanoelektronik |l Informationstechnologie mit nanoelektronischen Systemen |b Information |0 G:(DE-Juel1)FUEK252 |x 0 |
| 914 | 1 | _ | |y 2004 |
| 915 | _ | _ | |0 StatID:(DE-HGF)0010 |a JCR/ISI refereed |
| 920 | 1 | _ | |k IFF-IEM |l Elektronische Materialien |d 31.12.2006 |g IFF |0 I:(DE-Juel1)VDB321 |x 0 |
| 970 | _ | _ | |a VDB:(DE-Juel1)60852 |
| 980 | _ | _ | |a VDB |
| 980 | _ | _ | |a ConvertedRecord |
| 980 | _ | _ | |a journal |
| 980 | _ | _ | |a I:(DE-Juel1)PGI-7-20110106 |
| 980 | _ | _ | |a UNRESTRICTED |
| 981 | _ | _ | |a I:(DE-Juel1)PGI-7-20110106 |
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