%0 Conference Paper
%A Beyer, W.
%T Diffusion and solubility of hydrogen in amorphous and microcrystalline Si:H films
%M PreJuSER-44135
%@ 1-55899-600-1
%D 2001
%Z Record converted from VDB: 12.11.2012
%< Amorphous and Heterogeneous Silicon-Based Films / ed.: M. Stutzmann ... - Warrendale, PA, 2001. - (Materials Research Society Symposium Proceedings ; 664). - 1-55899-600-1.- A13.1.1 - 12
%F PUB:(DE-HGF)8 ; PUB:(DE-HGF)7
%9 Contribution to a conference proceedingsContribution to a book
%U https://juser.fz-juelich.de/record/44135