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000044135 245__ $$aDiffusion and solubility of hydrogen in amorphous and microcrystalline Si:H films
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000044135 29510 $$aAmorphous and Heterogeneous Silicon-Based Films / ed.: M. Stutzmann ... - Warrendale, PA, 2001. - (Materials Research Society Symposium Proceedings ; 664). - 1-55899-600-1.- A13.1.1 - 12
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