TY  - CONF
AU  - Beyer, W.
TI  - Diffusion and solubility of hydrogen in amorphous and microcrystalline Si:H films
M1  - PreJuSER-44135
SN  - 1-55899-600-1
PY  - 2001
N1  - Record converted from VDB: 12.11.2012
LB  - PUB:(DE-HGF)8 ; PUB:(DE-HGF)7
UR  - https://juser.fz-juelich.de/record/44135
ER  -