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245 _ _ |a Diffusion and solubility of hydrogen in amorphous and microcrystalline Si:H films
260 _ _ |c 2001
295 1 0 |a Amorphous and Heterogeneous Silicon-Based Films / ed.: M. Stutzmann ... - Warrendale, PA, 2001. - (Materials Research Society Symposium Proceedings ; 664). - 1-55899-600-1.- A13.1.1 - 12
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Marc 21