001     44705
005     20180210135018.0
024 7 _ |2 WOS
|a WOS:000226236100016
037 _ _ |a PreJuSER-44705
041 _ _ |a eng
082 _ _ |a 620
084 _ _ |2 WoS
|a Materials Science, Ceramics
100 1 _ |a Hofer, C.
|b 0
|0 P:(DE-HGF)0
245 _ _ |a Scaling effect on the dielectric constant in Ba(TixZr1-x)O3 thin films
260 _ _ |a Dordrecht [u.a.]
|b Springer Science + Business Media B.V
|c 2004
300 _ _ |a
336 7 _ |a Journal Article
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|2 PUB:(DE-HGF)
336 7 _ |a Output Types/Journal article
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336 7 _ |a Journal Article
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336 7 _ |a ARTICLE
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336 7 _ |a JOURNAL_ARTICLE
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336 7 _ |a article
|2 DRIVER
440 _ 0 |a Journal of Electroceramics
|x 1385-3449
|0 3263
|y 1
|v 13
500 _ _ |a Record converted from VDB: 12.11.2012
520 _ _ |a Recent work on PZT and BST thin films reveal a thickness dependence of the dielectric constant for a film thickness below 100 nm. This effect is commonly attributed to an interfacial layer between the electrode and the dielectric film (dead layer). In this contribution we report on the influence of the film thickness on the dielectric constant of Ba(TixZr1-x)O-3 thin films with different Zr-contents (x = 0-30 at.%). The films were prepared by chemical solution deposition (CSD) with thickness between 30 and 350 nm.The electrical characterization was performed in a temperature range between 25 and 200degreesC. Results were interpreted with respect to the formation of a serial dead layer capacitance.
536 _ _ |a Materialien, Prozesse und Bauelemente für die Mikro- und Nanoelektronik
|c I01
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588 _ _ |a Dataset connected to Web of Science
650 _ 7 |a J
|2 WoSType
653 2 0 |2 Author
|a dielectric properties
653 2 0 |2 Author
|a Ba(TixZr1-x)O-3
653 2 0 |2 Author
|a interface capacitance
700 1 _ |a Ellerkmann, U.
|b 1
|0 P:(DE-HGF)0
700 1 _ |a Halder, S.
|b 2
|0 P:(DE-HGF)0
700 1 _ |a Meyer, R.
|b 3
|u FZJ
|0 P:(DE-Juel1)VDB5958
700 1 _ |a Waser, R.
|b 4
|u FZJ
|0 P:(DE-Juel1)131022
773 _ _ |g Vol. 13
|q 13
|0 PERI:(DE-600)1472395-5
|t Journal of electroceramics
|v 13
|y 2004
|x 1385-3449
909 C O |o oai:juser.fz-juelich.de:44705
|p VDB
913 1 _ |k I01
|v Materialien, Prozesse und Bauelemente für die Mikro- und Nanoelektronik
|l Informationstechnologie mit nanoelektronischen Systemen
|b Information
|0 G:(DE-Juel1)FUEK252
|x 0
914 1 _ |a Nachtrag
|y 2004
915 _ _ |0 StatID:(DE-HGF)0010
|a JCR/ISI refereed
920 1 _ |k IFF-IEM
|l Elektronische Materialien
|d 31.12.2006
|g IFF
|0 I:(DE-Juel1)VDB321
|x 0
920 1 _ |k CNI
|l Center of Nanoelectronic Systems for Information Technology
|d 14.09.2008
|g CNI
|z 381
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970 _ _ |a VDB:(DE-Juel1)65546
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981 _ _ |a I:(DE-Juel1)PGI-7-20110106
981 _ _ |a I:(DE-Juel1)VDB381


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