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000045682 084__ $$2WoS$$aPhysics, Applied
000045682 1001_ $$0P:(DE-Juel1)VDB41360$$aLinke, F.$$b0$$uFZJ
000045682 245__ $$aQuantitative ellipsometric microscopy at the silicon-air interface
000045682 260__ $$a[S.l.]$$bAmerican Institute of Physics$$c2005
000045682 300__ $$a063701
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000045682 520__ $$aEllipsometric microscopy is a technique that combines the merits of ellipsometry and light microscopy, i.e., it allows noninvasive, label-free measurements of thin film thickness and refractive index at high lateral resolution. Here we give a detailed description of the technique including a complete calibration scheme and a model to correct for the instrumental polarization of the imaging optics. The performance of the instrument was studied experimentally. We found a lateral resolution of 1 mu m and an absolute height accuracy of 3 nm. The measured refractive indices were accurate to 2.3% and the height sensitivity of the instrument was smaller than 5 A. Another virtue of the instrument design besides its good performance is that it is in essence an extension of standard light microscopy and could be integrated into commercial microscopes. (c) 2005 American Institute of Physics.
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000045682 7001_ $$0P:(DE-Juel1)128833$$aMerkel, R.$$b1$$uFZJ
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