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@ARTICLE{Linke:45682,
      author       = {Linke, F. and Merkel, R.},
      title        = {{Q}uantitative ellipsometric microscopy at the silicon-air
                      interface},
      journal      = {Review of scientific instruments},
      volume       = {76},
      issn         = {0034-6748},
      address      = {[S.l.]},
      publisher    = {American Institute of Physics},
      reportid     = {PreJuSER-45682},
      pages        = {063701},
      year         = {2005},
      note         = {Record converted from VDB: 12.11.2012},
      abstract     = {Ellipsometric microscopy is a technique that combines the
                      merits of ellipsometry and light microscopy, i.e., it allows
                      noninvasive, label-free measurements of thin film thickness
                      and refractive index at high lateral resolution. Here we
                      give a detailed description of the technique including a
                      complete calibration scheme and a model to correct for the
                      instrumental polarization of the imaging optics. The
                      performance of the instrument was studied experimentally. We
                      found a lateral resolution of 1 mu m and an absolute height
                      accuracy of 3 nm. The measured refractive indices were
                      accurate to $2.3\%$ and the height sensitivity of the
                      instrument was smaller than 5 A. Another virtue of the
                      instrument design besides its good performance is that it is
                      in essence an extension of standard light microscopy and
                      could be integrated into commercial microscopes. (c) 2005
                      American Institute of Physics.},
      keywords     = {J (WoSType)},
      cin          = {ISG-4},
      ddc          = {530},
      cid          = {I:(DE-Juel1)VDB44},
      pnm          = {Kondensierte Materie},
      pid          = {G:(DE-Juel1)FUEK242},
      shelfmark    = {Instruments $\&$ Instrumentation / Physics, Applied},
      typ          = {PUB:(DE-HGF)16},
      UT           = {WOS:000229962000056},
      doi          = {10.1063/1.1921547},
      url          = {https://juser.fz-juelich.de/record/45682},
}