Hauptseite > Publikationsdatenbank > Quantitative ellipsometric microscopy at the silicon-air interface > print

001     45682
005     20200423204127.0
017 _ _ |a This version is available at the following Publisher URL: http://rsi.aip.org
024 7 _ |a 10.1063/1.1921547
|2 DOI
024 7 _ |a WOS:000229962000056
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024 7 _ |a 2128/2177
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037 _ _ |a PreJuSER-45682
041 _ _ |a eng
082 _ _ |a 530
084 _ _ |2 WoS
|a Instruments & Instrumentation
084 _ _ |2 WoS
|a Physics, Applied
100 1 _ |a Linke, F.
|b 0
|u FZJ
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245 _ _ |a Quantitative ellipsometric microscopy at the silicon-air interface
260 _ _ |a [S.l.]
|b American Institute of Physics
|c 2005
300 _ _ |a 063701
336 7 _ |a Journal Article
|0 PUB:(DE-HGF)16
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336 7 _ |a Journal Article
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336 7 _ |a article
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440 _ 0 |a Review of Scientific Instruments
|x 0034-6748
|0 5309
|v 76
500 _ _ |a Record converted from VDB: 12.11.2012
520 _ _ |a Ellipsometric microscopy is a technique that combines the merits of ellipsometry and light microscopy, i.e., it allows noninvasive, label-free measurements of thin film thickness and refractive index at high lateral resolution. Here we give a detailed description of the technique including a complete calibration scheme and a model to correct for the instrumental polarization of the imaging optics. The performance of the instrument was studied experimentally. We found a lateral resolution of 1 mu m and an absolute height accuracy of 3 nm. The measured refractive indices were accurate to 2.3% and the height sensitivity of the instrument was smaller than 5 A. Another virtue of the instrument design besides its good performance is that it is in essence an extension of standard light microscopy and could be integrated into commercial microscopes. (c) 2005 American Institute of Physics.
536 _ _ |a Kondensierte Materie
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588 _ _ |a Dataset connected to Web of Science
650 _ 7 |a J
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700 1 _ |a Merkel, R.
|b 1
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|0 P:(DE-Juel1)128833
773 _ _ |a 10.1063/1.1921547
|g Vol. 76, p. 063701
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|t Review of scientific instruments
|v 76
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|x 0034-6748
856 7 _ |u http://dx.doi.org/10.1063/1.1921547
|u http://hdl.handle.net/2128/2177
856 4 _ |u https://juser.fz-juelich.de/record/45682/files/70386.pdf
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914 1 _ |y 2005
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|d 31.12.2001
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981 _ _ |a I:(DE-Juel1)ICS-7-20110106

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