TY - JOUR
AU - Vasco, E.
TI - Theoretical optimization of the self-organized growth of nanoscale arrays through a figure of merit
JO - Applied physics letters
VL - 85
SN - 0003-6951
CY - Melville, NY
PB - American Institute of Physics
M1 - PreJuSER-47360
SP - 3714 - 3716
PY - 2004
N1 - Record converted from VDB: 12.11.2012
AB - A figure of merit is proposed in order to optimize the self-organized growth of nanoscale elements into one-/two-dimensional arrays via a fine selection of the deposition/annealing conditions. This figure of merit has been designed to account for the most significant defects inherent in such arrays. Its versatility has been studied by kinetic Monte Carlo simulations of self-organized growth of metal clusters on the 7x7 reconstructed Si(111) surface. The optimization relationships between deposition/annealing conditions and characteristics of the metal-on-Si(111)7x7 systems are obtained and analyzed within the framework of competition between thermodynamical tendencies and kinetic limitations. (C) 2004 American Institute of Physics.
KW - J (WoSType)
LB - PUB:(DE-HGF)16
UR - <Go to ISI:>//WOS:000224798700020
DO - DOI:10.1063/1.1807032
UR - https://juser.fz-juelich.de/record/47360
ER -