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@ARTICLE{Vasco:47360,
author = {Vasco, E.},
title = {{T}heoretical optimization of the self-organized growth of
nanoscale arrays through a figure of merit},
journal = {Applied physics letters},
volume = {85},
issn = {0003-6951},
address = {Melville, NY},
publisher = {American Institute of Physics},
reportid = {PreJuSER-47360},
pages = {3714 - 3716},
year = {2004},
note = {Record converted from VDB: 12.11.2012},
abstract = {A figure of merit is proposed in order to optimize the
self-organized growth of nanoscale elements into
one-/two-dimensional arrays via a fine selection of the
deposition/annealing conditions. This figure of merit has
been designed to account for the most significant defects
inherent in such arrays. Its versatility has been studied by
kinetic Monte Carlo simulations of self-organized growth of
metal clusters on the 7x7 reconstructed Si(111) surface. The
optimization relationships between deposition/annealing
conditions and characteristics of the metal-on-Si(111)7x7
systems are obtained and analyzed within the framework of
competition between thermodynamical tendencies and kinetic
limitations. (C) 2004 American Institute of Physics.},
keywords = {J (WoSType)},
cin = {IFF-IEM / CNI},
ddc = {530},
cid = {I:(DE-Juel1)VDB321 / I:(DE-Juel1)VDB381},
pnm = {Materialien, Prozesse und Bauelemente für die Mikro- und
Nanoelektronik},
pid = {G:(DE-Juel1)FUEK252},
shelfmark = {Physics, Applied},
typ = {PUB:(DE-HGF)16},
UT = {WOS:000224798700020},
doi = {10.1063/1.1807032},
url = {https://juser.fz-juelich.de/record/47360},
}