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@ARTICLE{Halder:47428,
      author       = {Halder, S. and Schneller, T. and Böttger, U. and Waser,
                      R.},
      title        = {{F}abrication and electrical characterization of
                      {Z}r-substituted {B}a{T}i{O}3 thin films},
      journal      = {Applied physics / A},
      volume       = {81},
      issn         = {0947-8396},
      address      = {Berlin},
      publisher    = {Springer},
      reportid     = {PreJuSER-47428},
      pages        = {25 - 29},
      year         = {2005},
      note         = {Record converted from VDB: 12.11.2012},
      cin          = {IFF-IEM / CNI},
      ddc          = {530},
      cid          = {I:(DE-Juel1)VDB321 / I:(DE-Juel1)VDB381},
      pnm          = {Materialien, Prozesse und Bauelemente für die Mikro- und
                      Nanoelektronik},
      pid          = {G:(DE-Juel1)FUEK252},
      typ          = {PUB:(DE-HGF)16},
      UT           = {WOS:000228794000005},
      doi          = {10.1007/s00339-004-3096-x},
      url          = {https://juser.fz-juelich.de/record/47428},
}