% IMPORTANT: The following is UTF-8 encoded. This means that in the presence
% of non-ASCII characters, it will not work with BibTeX 0.99 or older.
% Instead, you should use an up-to-date BibTeX implementation like “bibtex8” or
% “biber”.
@ARTICLE{Han:47542,
author = {Han, Y. and Mayer, D. and Offenhäusser, A. and Ingebrandt,
S.},
title = {{S}urface activation of thin silicon oxides by wet cleaning
and silanization},
journal = {Thin solid films},
volume = {510},
issn = {0040-6090},
address = {Amsterdam [u.a.]},
publisher = {Elsevier},
reportid = {PreJuSER-47542},
pages = {175 - 180},
year = {2006},
note = {Record converted from VDB: 12.11.2012},
abstract = {Silanization protocols for glass slides and silicon oxide
substrates usually include acid rinsing steps to activate
the surfaces prior to silanization. In our group,
field-effect transistor devices and
electrolyte-insulator-semiconductor structures are used to
electronically record signals from cells or to detect
biomolecular interactions at the solid-liquid interface. A
miniaturized, high sensitive, field-effect-based
semiconductor device should expose at its input stage just a
thin oxide (< 10 nm) to the electrolyte solution. Therefore,
silanization protocols are needed, which do not alter the
thin oxide layers in terms of topology changes or thickness
loss. In this article we evaluated different protocols for
wet cleaning and activation of thin silicon oxides. The
efficiency of the cleaning methods was verified with Contact
Angle Measurements, Atomic Force Microscopy, and
Fourier-Transform Infrared Spectroscopy. Furthermore, X-ray
Photoelectron Spectroscopy was used to characterize the
oxides after the cleaning and silanization procedures.
(3-aminopropyl)triethoxysilane was used to functionalize the
oxide surfaces for further attachment of biological
molecules (e.g. proteins, DNA). Thicknesses and uniformity
of the silane coatings were evaluated by Imaging
Ellipsometry. (c) 2005 Elsevier B.V. All rights reserved.},
keywords = {J (WoSType)},
cin = {CNI / ISG-2 / JARA-FIT},
ddc = {070},
cid = {I:(DE-Juel1)VDB381 / I:(DE-Juel1)VDB42 /
$I:(DE-82)080009_20140620$},
pnm = {Grundlagen für zukünftige Informationstechnologien},
pid = {G:(DE-Juel1)FUEK412},
shelfmark = {Materials Science, Multidisciplinary / Materials Science,
Coatings $\&$ Films / Physics, Applied / Physics, Condensed
Matter},
typ = {PUB:(DE-HGF)16},
UT = {WOS:000238011200029},
doi = {10.1016/j.tsf.2005.11.048},
url = {https://juser.fz-juelich.de/record/47542},
}