%0 Conference Paper
%A Tschersich, K. G.
%A Littmark, U.
%A Beyer, W.
%T Adjustable hydrogen atom incorporation into sputter deposited a-SiC
%M PreJuSER-49267
%D 2005
%Z Record converted from VDB: 12.11.2012
%< 13th International Congress on Thin Films
Y2 19 Jun 2005
M2 Stockholm, Sweden, 
%F PUB:(DE-HGF)6
%9 Conference Presentation
%U https://juser.fz-juelich.de/record/49267