TY  - CONF
AU  - Tschersich, K. G.
AU  - Littmark, U.
AU  - Beyer, W.
TI  - Adjustable hydrogen atom incorporation into sputter deposited a-SiC
M1  - PreJuSER-49267
PY  - 2005
N1  - Record converted from VDB: 12.11.2012
Y2  - 19 Jun 2005
M2  - Stockholm, Sweden, 
LB  - PUB:(DE-HGF)6
UR  - https://juser.fz-juelich.de/record/49267
ER  -