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@INPROCEEDINGS{Tschersich:49267,
      author       = {Tschersich, K. G. and Littmark, U. and Beyer, W.},
      title        = {{A}djustable hydrogen atom incorporation into sputter
                      deposited a-{S}i{C}},
      reportid     = {PreJuSER-49267},
      year         = {2005},
      note         = {Record converted from VDB: 12.11.2012},
      comment      = {13th International Congress on Thin Films},
      booktitle     = {13th International Congress on Thin
                       Films},
      month         = {Jun},
      date          = {2005-06-19},
      organization  = {Stockholm, Sweden, 19 Jun 2005},
      cin          = {ISG-4 / IPV / ISG-1},
      cid          = {I:(DE-Juel1)VDB44 / I:(DE-Juel1)VDB46 / I:(DE-Juel1)VDB41},
      pnm          = {Photovoltaik / Kondensierte Materie / Materialien, Prozesse
                      und Bauelemente für die Mikro- und Nanoelektronik},
      pid          = {G:(DE-Juel1)FUEK247 / G:(DE-Juel1)FUEK242 /
                      G:(DE-Juel1)FUEK252},
      typ          = {PUB:(DE-HGF)6},
      url          = {https://juser.fz-juelich.de/record/49267},
}