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@ARTICLE{Meyer:49731,
author = {Meyer, R. and Waser, R. and Prume, K. and Schmitz, T. and
Tiedke, S.},
title = {{D}ynamic leakage current compensation in ferroelectric
thin-film capacitor structures},
journal = {Applied physics letters},
volume = {86},
issn = {0003-6951},
address = {Melville, NY},
publisher = {American Institute of Physics},
reportid = {PreJuSER-49731},
pages = {142907},
year = {2005},
note = {Record converted from VDB: 12.11.2012},
abstract = {We report on a measurement procedure to separate
ferroelectric switching current and dielectric displacement
current from the leakage current in leaky ferroelectric
thin-film capacitor structures. The ac current response is
determined for two adjacent frequencies. Taking advantage of
the different frequency dependencies of the ferroelectric
switching current, dielectric displacement current and ohmic
current, the hysteresis loop is calculated without
performing a static leakage current measurement, which
causes a high dc field stress to the sample. The
applicability of the proposed measurement procedure is
demonstrated on a Pt/Pb(Zr,Ti)O-3/IrO2 ferroelectric
capacitor revealing a high leakage current. (C) 2005
American Institute of Physics.},
keywords = {J (WoSType)},
cin = {IFF-IEM / CNI},
ddc = {530},
cid = {I:(DE-Juel1)VDB321 / I:(DE-Juel1)VDB381},
pnm = {Materialien, Prozesse und Bauelemente für die Mikro- und
Nanoelektronik},
pid = {G:(DE-Juel1)FUEK252},
shelfmark = {Physics, Applied},
typ = {PUB:(DE-HGF)16},
UT = {WOS:000228242700044},
doi = {10.1063/1.1897425},
url = {https://juser.fz-juelich.de/record/49731},
}