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@ARTICLE{Baldus:49735,
      author       = {Baldus, O. and Waser, R.},
      title        = {{L}aser crystallization studies of barium strontium
                      titanate thin films},
      journal      = {Journal of the European Ceramic Society},
      volume       = {24},
      issn         = {0955-2219},
      address      = {Amsterdam [u.a.]},
      publisher    = {Elsevier Science},
      reportid     = {PreJuSER-49735},
      pages        = {3013},
      year         = {2004},
      note         = {Record converted from VDB: 12.11.2012},
      abstract     = {It is reported about laser crystallization investigations
                      of the amorphous thin-film ceramic Ba0.7Sr0.3TiO3 (BST) with
                      platinum electrodes on silicon substrates using ArF and KrF
                      excimer lasers. The film thickness is an important parameter
                      and was adjusted to minimize crack formation. For each film
                      thickness the different laser parameters, such as pulse
                      energy density, pulse number, and pulse length, were
                      optimized. Thermal modeling was applied for the analysis of
                      laser processing. During the preparation and crystallization
                      process, the substrate temperature never exceeded 450
                      degreesC. For the first time, BST thin films have been
                      crystallized by applying UV laser pulses for producing high
                      k planar structures. The best electrical properties were
                      obtained at a film thickness of 95 net. The mechanisms
                      resulting in the damaging of the thin films by short laser
                      pulses were investigated systematically. (C) 2003 Elsevier
                      Ltd. All rights reserved.},
      keywords     = {J (WoSType)},
      cin          = {IFF-IEM / CNI},
      ddc          = {660},
      cid          = {I:(DE-Juel1)VDB321 / I:(DE-Juel1)VDB381},
      pnm          = {Materialien, Prozesse und Bauelemente für die Mikro- und
                      Nanoelektronik},
      pid          = {G:(DE-Juel1)FUEK252},
      shelfmark    = {Materials Science, Ceramics},
      typ          = {PUB:(DE-HGF)16},
      UT           = {WOS:000222117700014},
      doi          = {10.1016/j.jeurceramsoc.2003.11.007},
      url          = {https://juser.fz-juelich.de/record/49735},
}