TY  - CONF
AU  - Dekkers, H. F. W.
AU  - Carnel, L.
AU  - Beaucarne, G.
AU  - Beyer, W.
TI  - Diffusion mechanism of hydrogen through PECVD SiNx:H for a fast defect passivation of mc-Si solar cells
M1  - PreJuSER-49826
PY  - 2005
N1  - Record converted from VDB: 12.11.2012
LB  - PUB:(DE-HGF)8 ; PUB:(DE-HGF)7
UR  - https://juser.fz-juelich.de/record/49826
ER  -