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@INPROCEEDINGS{Dekkers:49826,
      author       = {Dekkers, H. F. W. and Carnel, L. and Beaucarne, G. and
                      Beyer, W.},
      title        = {{D}iffusion mechanism of hydrogen through {PECVD}
                      {S}i{N}x:{H} for a fast defect passivation of mc-{S}i solar
                      cells},
      reportid     = {PreJuSER-49826},
      year         = {2005},
      note         = {Record converted from VDB: 12.11.2012},
      comment      = {Proceedings of the 20th European Photovoltaic Solar Energy
                      Conference and Exhibition, 6-10 June, Barcelona, Spain. -
                      2005. - S. 721},
      booktitle     = {Proceedings of the 20th European
                       Photovoltaic Solar Energy Conference
                       and Exhibition, 6-10 June, Barcelona,
                       Spain. - 2005. - S. 721},
      cin          = {IPV},
      cid          = {I:(DE-Juel1)VDB46},
      pnm          = {Photovoltaik},
      pid          = {G:(DE-Juel1)FUEK247},
      typ          = {PUB:(DE-HGF)8 / PUB:(DE-HGF)7},
      url          = {https://juser.fz-juelich.de/record/49826},
}