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@ARTICLE{He:49884,
author = {He, J. Q. and Jia, C. L. and Vaithyanathan, V. and Schlom,
D. G. and Schubert, J. and Gerber, A. and Kohlstedt, H. H.
and Wang, R. H.},
title = {{I}nterfacial reaction in the growth of epitaxial
{S}r{T}i{O}3 thin films on (001) {S}i substrates},
journal = {Journal of applied physics},
volume = {97},
issn = {0021-8979},
address = {Melville, NY},
publisher = {American Institute of Physics},
reportid = {PreJuSER-49884},
pages = {104921},
year = {2005},
note = {Record converted from VDB: 12.11.2012},
abstract = {The SrTiO3/Si interface was investigated by transmission
electron microscopy for SrTiO3 films grown on (001) Si by
molecular-beam epitaxy with different native oxide (SiO2)
removal treatments, and Sr/Ti flux ratios. The interface and
film microstructure were independent of the process used to
remove the native oxide, but the interface reactivity was
dependent on the Sr/Ti flux ratio. A low Sr/Ti flux ratio
(similar to 0.8) resulted not only in a layer of amorphous
material at the film/substrate interface but also in the
formation of crystalline C49 TiSi2 precipitates at that
interface. These results are consistent with thermodynamic
expectations in which it is paramount to maintain separation
between TiO2 and the underlying silicon. (c) 2005 American
Institute of Physics.},
keywords = {J (WoSType)},
cin = {ISG-1 / CNI / IFF-IMF / IFF-IEM},
ddc = {530},
cid = {I:(DE-Juel1)VDB41 / I:(DE-Juel1)VDB381 / I:(DE-Juel1)VDB37
/ I:(DE-Juel1)VDB321},
pnm = {Materialien, Prozesse und Bauelemente für die Mikro- und
Nanoelektronik},
pid = {G:(DE-Juel1)FUEK252},
shelfmark = {Physics, Applied},
typ = {PUB:(DE-HGF)16},
UT = {WOS:000230168100183},
doi = {10.1063/1.1915519},
url = {https://juser.fz-juelich.de/record/49884},
}