TY - JOUR AU - Weides, M. AU - Tillmann, K. AU - Kohlstedt, H. TI - Fabrication of High Quality Ferromagnetic Josephson Junctions JO - Physica / C VL - 437-438 SN - 0921-4534 CY - Amsterdam PB - North-Holland Physics Publ. M1 - PreJuSER-51694 SP - 349 - 352 PY - 2006 N1 - Record converted from VDB: 12.11.2012 AB - We present ferromagnetic Nb/Al2O3/Ni60Cu40/Nb Josephson junctions (SIFS) with an ultrathin Al2O3 tunnel barrier. The junction fabrication was optimized regarding junction insulation and homogeneity of current transport. Using ion-beam-etching and anodic oxidation we defined and insulated the junction mesas. The additional 2 nm thin Cu-layer below the ferromagnetic NiCu (SINFS) lowered interface roughness and ensured very homogeneous current transport. A high yield of junctional devices with j(c) spreads less than 2% was obtained. (c) 2005 Elsevier B.V. All rights reserved. KW - J (WoSType) LB - PUB:(DE-HGF)16 UR - <Go to ISI:>//WOS:000238395700083 DO - DOI:10.1016/j.physc.2005.12.046 UR - https://juser.fz-juelich.de/record/51694 ER -