TY  - JOUR
AU  - Watanabe, T.
AU  - Hoffmann-Eifert, S.
AU  - Hwang, C. S.
AU  - Waser, R.
TI  - Liquid-injection atomic layer deposition of TiOx and Pb-Ti-O films
JO  - Journal of the Electrochemical Society
VL  - 153
SN  - 0013-4651
CY  - Pennington, NJ
PB  - Electrochemical Society
M1  - PreJuSER-53254
SP  - F199 - F204
PY  - 2006
N1  - Record converted from VDB: 12.11.2012
AB  - Pb-Ti-O films were prepared by liquid-injection atomic layer deposition (ALD) using H2O as oxygen source after evaluating Ti precursors with different beta-diketonate type ligands, Ti(OC3H7)(2)(C11H19O2)(2) [Ti(Oi-Pr)(2)(DPM)(2)] and Ti(OC5H11)(2)(C10H17O2)(2) [Ti(Ot-Am)(2)(IBPM)(2)], dissolved in ethylcyclohexane. For both Ti precursors, the apparent thermal activation energy of the deposition rate of TiOx films increased at a deposition temperature of about 380 degrees C, and the deposition rate of TiOx films grown at 300 degrees C saturated against the volume of injected Ti precursors. Ti(Oi-Pr)(2)(DPM)(2) was selected for the subsequent Pb-Ti-O film deposition because of its high precursor efficiency and the low temperature dependence of the deposition rate. Pb-Ti-O films were prepared using Ti(Oi-Pr)(2)(DPM)(2) and Pb(C12H21O2)(2) [Pb(TMOD)(2)] at deposition temperatures of 240 and 300 degrees C. The deposition rates of Pb and Ti in the Pb-Ti-O process were higher than those in binary PbO and TiOx processes under the same deposition conditions. The deposition rate of Pb in the Pb-Ti-O process showed a linear increase in response to the injected Pb precursor volume, which was different from the saturated deposition rate of the PbO process. The interface chemistry between the precursors and predeposited cation layers has critical impact on the self-regulated growth mechanism in the multicomponent oxide ALD. (c) 2006 The Electrochemical Society.
KW  - J (WoSType)
LB  - PUB:(DE-HGF)16
UR  - <Go to ISI:>//WOS:000239250600052
DO  - DOI:10.1149/1.2219709
UR  - https://juser.fz-juelich.de/record/53254
ER  -