000053299 001__ 53299
000053299 005__ 20200423204356.0
000053299 017__ $$aThis version is available at the following Publisher URL: http://jap.aip.org
000053299 0247_ $$2DOI$$a10.1063/1.2202115
000053299 0247_ $$2WOS$$aWOS:000238314900077
000053299 0247_ $$2Handle$$a2128/1031
000053299 037__ $$aPreJuSER-53299
000053299 041__ $$aeng
000053299 082__ $$a530
000053299 084__ $$2WoS$$aPhysics, Applied
000053299 1001_ $$0P:(DE-Juel1)VDB3072$$aEhrhart, P.$$b0$$uFZJ
000053299 245__ $$aElectrical properties of (Ba, Sr) TiO3 thin films revisited: the case of chemical vapor deposited films on Pt electrodes
000053299 260__ $$aMelville, NY$$bAmerican Institute of Physics$$c2006
000053299 300__ $$a114108
000053299 3367_ $$0PUB:(DE-HGF)16$$2PUB:(DE-HGF)$$aJournal Article
000053299 3367_ $$2DataCite$$aOutput Types/Journal article
000053299 3367_ $$00$$2EndNote$$aJournal Article
000053299 3367_ $$2BibTeX$$aARTICLE
000053299 3367_ $$2ORCID$$aJOURNAL_ARTICLE
000053299 3367_ $$2DRIVER$$aarticle
000053299 440_0 $$03051$$aJournal of Applied Physics$$v99$$x0021-8979
000053299 500__ $$aRecord converted from VDB: 12.11.2012
000053299 520__ $$aDue to the dependence on both bulk and interface properties neither the effective dielectric constant epsilon nor the leakage current J can be scaled in a straightforward manner with film thickness for high-epsilon thin film capacitors. Based on detailed investigations of different thickness series of (Ba,Sr)TiO3 films on platinized substrates the bulk and interfacial properties are separated. An approach to estimate the apparent interfacial layer thickness is discussed. The behavior of the leakage current is divided in two regions: for low voltages, <= 1 V, the currents are very low, <= 10(-10) A/cm(2), and dominated by the relaxation currents (Curie-von Schweidler behavior). At higher voltages the change to a very strong power law dependence is observed, J similar to E-16. The thickness dependence is removed by scaling with the internal field or dielectric displacement of the film, D=epsilon(0)epsilon E. Hence, a direct connection between the increase in epsilon and the increase in leakage with film thickness is revealed. This behavior is accompanied by a larger scatter of the data and seems to be controlled by a more inhomogeneous or local conductivity. Influences of the measuring temperature and of stoichiometry and interfacial properties are discussed. (c) 2006 American Institute of Physics.
000053299 536__ $$0G:(DE-Juel1)FUEK412$$2G:(DE-HGF)$$aGrundlagen für zukünftige Informationstechnologien$$cP42$$x0
000053299 588__ $$aDataset connected to Web of Science
000053299 650_7 $$2WoSType$$aJ
000053299 7001_ $$0P:(DE-Juel1)VDB35139$$aThomas, R.$$b1$$uFZJ
000053299 773__ $$0PERI:(DE-600)1476463-5$$a10.1063/1.2202115$$gVol. 99, p. 114108$$p114108$$q99<114108$$tJournal of applied physics$$v99$$x0021-8979$$y2006
000053299 8567_ $$uhttp://hdl.handle.net/2128/1031$$uhttp://dx.doi.org/10.1063/1.2202115
000053299 8564_ $$uhttps://juser.fz-juelich.de/record/53299/files/83761.pdf$$yOpenAccess
000053299 8564_ $$uhttps://juser.fz-juelich.de/record/53299/files/83761.jpg?subformat=icon-1440$$xicon-1440$$yOpenAccess
000053299 8564_ $$uhttps://juser.fz-juelich.de/record/53299/files/83761.jpg?subformat=icon-180$$xicon-180$$yOpenAccess
000053299 8564_ $$uhttps://juser.fz-juelich.de/record/53299/files/83761.jpg?subformat=icon-640$$xicon-640$$yOpenAccess
000053299 909CO $$ooai:juser.fz-juelich.de:53299$$pdnbdelivery$$pVDB$$pdriver$$popen_access$$popenaire
000053299 9131_ $$0G:(DE-Juel1)FUEK412$$bSchlüsseltechnologien$$kP42$$lGrundlagen für zukünftige Informationstechnologien (FIT)$$vGrundlagen für zukünftige Informationstechnologien$$x0
000053299 9141_ $$y2006
000053299 915__ $$0StatID:(DE-HGF)0010$$aJCR/ISI refereed
000053299 915__ $$0StatID:(DE-HGF)0510$$2StatID$$aOpenAccess
000053299 9201_ $$0I:(DE-Juel1)VDB321$$d31.12.2006$$gIFF$$kIFF-IEM$$lElektronische Materialien$$x0
000053299 9201_ $$0I:(DE-Juel1)VDB381$$d14.09.2008$$gCNI$$kCNI$$lCenter of Nanoelectronic Systems for Information Technology$$x1$$z381
000053299 970__ $$aVDB:(DE-Juel1)83761
000053299 980__ $$aVDB
000053299 980__ $$aJUWEL
000053299 980__ $$aConvertedRecord
000053299 980__ $$ajournal
000053299 980__ $$aI:(DE-Juel1)PGI-7-20110106
000053299 980__ $$aI:(DE-Juel1)VDB381
000053299 980__ $$aUNRESTRICTED
000053299 980__ $$aFullTexts
000053299 9801_ $$aFullTexts
000053299 981__ $$aI:(DE-Juel1)PGI-7-20110106
000053299 981__ $$aI:(DE-Juel1)VDB381