TY  - JOUR
AU  - Petraru, A.
AU  - Nagarajan, V.
AU  - Kohlstedt, H.
AU  - Ramesh, R.
AU  - Schlom, D. G.
AU  - Waser, R.
TI  - Simultaneous measurement of the piezoelectric and dielectric response of nanoscale ferroelectric capacitors by an atomic force microscopy based approach
JO  - Applied physics / A
VL  - 84
SN  - 0947-8396
CY  - Berlin
PB  - Springer
M1  - PreJuSER-53696
SP  - 67
PY  - 2006
N1  - Record converted from VDB: 12.11.2012
AB  - We present a sensitive method to simultaneously acquire the C(V) characteristics and piezoresponse of sub-micron size ferroelectric capacitors using an Atomic Force Microscope (AFM). Model Pt/(La-0.5,Sr-0.5)CoO3/PbZr0.4Ti0.6 O-3/(La-0.5,Sr-0.5)CoO3/La:SrTiO3/Si nanocapacitors were fabricated by focused ion beam milling from 100 mu m(2) down to 0.04 mu m(2). With this AFM based capacitance measurement technique we show clear "double-humped" C(V) for all sizes with no significant change in the peak value of the epsilon(r) down to capacitors with the smallest area of 0.04 mu m(2). The smallest capacitance measured is only of the order a few femtofarads, demonstrating the high sensitivity of the technique. Simultaneously, the piezoelectric response is recorded for each measurement, thus the technique facilitates simultaneous piezoresponse and dielectric characterization of ferroelectric memory devices.
KW  - J (WoSType)
LB  - PUB:(DE-HGF)16
UR  - <Go to ISI:>//WOS:000237499700010
DO  - DOI:10.1007/s00339-006-3592-2
UR  - https://juser.fz-juelich.de/record/53696
ER  -