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@ARTICLE{Petraru:53696,
      author       = {Petraru, A. and Nagarajan, V. and Kohlstedt, H. and Ramesh,
                      R. and Schlom, D. G. and Waser, R.},
      title        = {{S}imultaneous measurement of the piezoelectric and
                      dielectric response of nanoscale ferroelectric capacitors by
                      an atomic force microscopy based approach},
      journal      = {Applied physics / A},
      volume       = {84},
      issn         = {0947-8396},
      address      = {Berlin},
      publisher    = {Springer},
      reportid     = {PreJuSER-53696},
      pages        = {67},
      year         = {2006},
      note         = {Record converted from VDB: 12.11.2012},
      abstract     = {We present a sensitive method to simultaneously acquire the
                      C(V) characteristics and piezoresponse of sub-micron size
                      ferroelectric capacitors using an Atomic Force Microscope
                      (AFM). Model Pt/(La-0.5,Sr-0.5)CoO3/PbZr0.4Ti0.6
                      O-3/(La-0.5,Sr-0.5)CoO3/La:SrTiO3/Si nanocapacitors were
                      fabricated by focused ion beam milling from 100 mu m(2) down
                      to 0.04 mu m(2). With this AFM based capacitance measurement
                      technique we show clear "double-humped" C(V) for all sizes
                      with no significant change in the peak value of the
                      epsilon(r) down to capacitors with the smallest area of 0.04
                      mu m(2). The smallest capacitance measured is only of the
                      order a few femtofarads, demonstrating the high sensitivity
                      of the technique. Simultaneously, the piezoelectric response
                      is recorded for each measurement, thus the technique
                      facilitates simultaneous piezoresponse and dielectric
                      characterization of ferroelectric memory devices.},
      keywords     = {J (WoSType)},
      cin          = {IFF-IEM / CNI / JARA-FIT},
      ddc          = {530},
      cid          = {I:(DE-Juel1)VDB321 / I:(DE-Juel1)VDB381 /
                      $I:(DE-82)080009_20140620$},
      pnm          = {Grundlagen für zukünftige Informationstechnologien},
      pid          = {G:(DE-Juel1)FUEK412},
      shelfmark    = {Materials Science, Multidisciplinary / Physics, Applied},
      typ          = {PUB:(DE-HGF)16},
      UT           = {WOS:000237499700010},
      doi          = {10.1007/s00339-006-3592-2},
      url          = {https://juser.fz-juelich.de/record/53696},
}