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@PHDTHESIS{vandenDonker:55221,
      author       = {van den Donker, Menno N.},
      title        = {{P}lasma {D}eposition of {M}icrocrystalline {S}ilicon
                      {S}olar {C}ells: {L}ooking {B}eyond the {G}lass},
      volume       = {57},
      school       = {Unversität Eindhoven},
      type         = {Dr. (Univ.)},
      address      = {Jülich},
      publisher    = {Forschungszentrum Jülich GmbH Zentralbibliothek, Verlag},
      reportid     = {PreJuSER-55221},
      isbn         = {3-89336-456-0},
      series       = {Schriften des Forschungszentrums Jülich. Reihe
                      Energietechnik / Energy Technology},
      pages        = {VI, 110 S.},
      year         = {2006},
      note         = {Record converted from VDB: 12.11.2012; Universität
                      Eindhoven, Diss., 2006},
      abstract     = {Microcrystalline silicon emerged in the past decade as
                      highly interesting material for application in efficient and
                      stable thin film silicon solar cells. It consists of
                      nanometer-sized crystallites embedded in a micrometer-sized
                      columnar structure, which gradually evolves during the SiH4
                      based deposition process starting from an amorphous
                      incubation layer. Understanding of and control over this
                      transient and multi-scale growth process is essential in the
                      route towards low-cost microcrystalline silicon solar cells.
                      This thesis presents an experimental study on the
                      technologically relevant high rate (5-10 $\mathring{A}$
                      s$^{−1}$) parallel plate plasma deposition process of
                      state-of-the-art microcrystalline silicon solar cells. The
                      objective of the work was to explore and understand the
                      physical limits of the plasma deposition process as well as
                      to develop diagnostics suitable for process control in
                      eventual solar cell production. Among the developed
                      non-invasive process diagnostics were a pyrometer, an
                      optical spectrometer, a mass spectrometer and a voltage
                      probe. Complete thin film silicon solar cells and modules
                      were deposited and characterized. It was established that
                      under state-of-the-art high rate deposition conditions new
                      challenges arise regarding temperature control since the
                      high RF power dissipated in the plasma causes the substrate
                      to heat up significantly during film growth. On the basis of
                      experimental results a semi-empirical engineering model was
                      developed that describes the magnitude of this plasma
                      induced substrate heating for arbitrary reactor geometry and
                      process settings. The experimental study revealed that
                      plasma induced substrate heating leads to sub-optimal
                      material quality and solar cell performance and it should be
                      prevented by designing and incorporating a fast active
                      substrate temperature control in deposition reactors.
                      Another treated aspect of high rate deposition is the
                      required high dilution of the SiH$_{4}$ gas in H$_{2}$,
                      which is of importance to the on-going cost price
                      reductions. It was established that under conditions of low
                      H2 dilution transient depletion of the SiH$_{4}$ source gas
                      evolves through diffusion of SiH4 from the surrounding
                      reactor volume back into the plasma and prevents successful
                      nucleation of crystallites. A self-consistent analytical
                      engineering model was developed for the general description
                      of this transient depletion of source gases as the [...]},
      cin          = {IPV},
      ddc          = {620},
      cid          = {I:(DE-Juel1)VDB46},
      pnm          = {Erneuerbare Energien},
      pid          = {G:(DE-Juel1)FUEK401},
      typ          = {PUB:(DE-HGF)11 / PUB:(DE-HGF)3},
      url          = {https://juser.fz-juelich.de/record/55221},
}