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@ARTICLE{Merdzhanova:55336,
author = {Merdzhanova, T. and Carius, R. and Klein, S. and Finger, F.
and Dimova-Malinovska, D.},
title = {{D}efect states in microcrystalline silicon probed by
photoluminescence spectroscopy},
journal = {Thin solid films},
volume = {511-512},
issn = {0040-6090},
address = {Amsterdam [u.a.]},
publisher = {Elsevier},
reportid = {PreJuSER-55336},
pages = {394 - 398},
year = {2006},
note = {Record converted from VDB: 12.11.2012},
abstract = {Photoluminescence (PL) spectroscopy is used to investigate
defects and localized band tail states within the band gap
of hydrogenated microcrystalline silicon (mu c-Si:H)
prepared by plasma enhanced chemical vapor deposition
(PECVD) and hot wire chemical vapor deposition (HWCVD). The
effect of the substrate temperature (T-S), which influences
mainly the defect density, and silane concentration (SC), as
the key parameter to control the microstructure of the
material were varied. In high quality mu c-Si:H films (T-S=
185-200 degrees C) a PL band ('mu c'-Si-band) is observed at
similar to 0.9-1.05 eV which is attributed to radiative
recombination via localized band tail states in the
microcrystalline phase. In mu c-Si:H films prepared at
higher T-S (> 300 degrees C), an additional PL band at
similar to 0.7 eV with a width of similar to 0.17 eV is
found for both PECVD and HWCVD material. This band maintains
its position at similar to 0.7 eV with increasing SC in
contrast to the observed shift of the 'mu c'-Si-band to
higher energies. Studies of the temperature dependences of
the PL peak energy and intensity for the two bands show: (i)
the PL band at 0.7 eV remains unaffected upon increasing
temperature, while the 'mu c'-Si-band shifts to lower
energies, (ii) a much weaker quenching for the 0.7 eV band
compared to the 'mu c'-Si-band. It was also found that the
PL band at 0.7 eV exhibits a slightly stronger temperature
dependence of the PL intensity compared to 'defect' band at
0.9 eV in a-Si:H suggesting similar recombination transition
via deeper trap states. Due to a similar PL properties of
the emission band previously observed in Czochralski-grown
silicon (Cz-Si), the 0.7 eV band in mu c-Si:H is assigned
tentatively to defect-related transitions in the crystalline
phase. (c) 2005 Elsevier B.V All rights reserved.},
keywords = {J (WoSType)},
cin = {IPV / JARA-ENERGY},
ddc = {070},
cid = {I:(DE-Juel1)VDB46 / $I:(DE-82)080011_20140620$},
pnm = {Erneuerbare Energien},
pid = {G:(DE-Juel1)FUEK401},
shelfmark = {Materials Science, Multidisciplinary / Materials Science,
Coatings $\&$ Films / Physics, Applied / Physics, Condensed
Matter},
typ = {PUB:(DE-HGF)16},
UT = {WOS:000238249000080},
doi = {10.1016/j.tsf.2005.12.114},
url = {https://juser.fz-juelich.de/record/55336},
}