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@ARTICLE{Mlynarczyk:55869,
      author       = {Mlynarczyk, M. and Szot, K. and Petraru, A. and Poppe, U.
                      and Breuer, U. and Waser, R. and Tomala, K.},
      title        = {{S}urface layer of {S}r{R}u{O}3 epitaxial thin films under
                      oxidizing and reducing conditions},
      journal      = {Journal of applied physics},
      volume       = {101},
      issn         = {0021-8979},
      address      = {Melville, NY},
      publisher    = {American Institute of Physics},
      reportid     = {PreJuSER-55869},
      pages        = {023701 - 0237011},
      year         = {2007},
      note         = {Record converted from VDB: 12.11.2012},
      abstract     = {Imperfect stoichiometry and heterogeneity of a surface
                      layer of SrRuO3 epitaxial thin films, grown on SrTiO3
                      substrates, are presented with the help of various methods.
                      Rutherford backscattering spectroscopy, x-ray photoemission
                      spectroscopy (XPS), and time of flight secondary ion mass
                      spectrometry are used to obtain information about the
                      stoichiometry and uniformity of the SrRuO3 structure. The
                      temperature of chemical decomposition is first determined
                      for polycrystalline samples under different conditions using
                      thermogravimetry analysis. Then the determined values are
                      used for thin film annealings in high and low oxygen
                      pressure ambients, namely, air, vacuum, and hydrogen. The
                      surface deterioration of the thin film together with changes
                      in its electronic structure is investigated. O1s and Sr3d
                      core lines measured by XPS for as-made samples obviously
                      consist of multiple components indicating different chemical
                      surroundings of atoms. Thanks to different incident beam
                      angle measurements it is possible to distinguish between
                      interior and surface components. Valence band spectra of the
                      interior of the film are consistent with theoretical
                      calculations. After annealing, the ratio of the different
                      components changes drastically. Stoichiometry near the
                      surface changes, mostly due to ruthenium loss (RuOX) or a
                      segregation process. The width and position of the Ru3p line
                      for as-made samples suggest a mixed oxidation state from
                      metallic to fully oxidized. Long annealing in hydrogen or
                      vacuum ambient leads to a complete reduction of ruthenium to
                      the metallic state. Local conductivity atomic force
                      microscopy scans reveal the presence of nonconductive
                      adsorbates incorporated in the surface region of the film.
                      Charge transport in these measurements shows a tunneling
                      character. Scanning tunneling microscopy scans show some
                      loose and mobile adsorbates on the surface, likely
                      containing hydroxyls. These results suggest that an adequate
                      description of a SrRuO3 thin film should take into account
                      imperfections and high reactivity of its surface region. (c)
                      2007 American Institute of Physics.},
      keywords     = {J (WoSType)},
      cin          = {IFF-6 / CNI / IFF-8 / ZCH / JARA-FIT},
      ddc          = {530},
      cid          = {I:(DE-Juel1)VDB786 / I:(DE-Juel1)VDB381 /
                      I:(DE-Juel1)VDB788 / I:(DE-Juel1)ZCH-20090406 /
                      $I:(DE-82)080009_20140620$},
      pnm          = {Grundlagen für zukünftige Informationstechnologien /
                      Terrestrische Umwelt},
      pid          = {G:(DE-Juel1)FUEK412 / G:(DE-Juel1)FUEK407},
      shelfmark    = {Physics, Applied},
      typ          = {PUB:(DE-HGF)16},
      UT           = {WOS:000243890800059},
      doi          = {10.1063/1.2408382},
      url          = {https://juser.fz-juelich.de/record/55869},
}