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@ARTICLE{Vincze:5654,
      author       = {Vincze, A. and Luptak, R. and Huseková, K. and Dobrocka,
                      E. and Fröhlich, K.},
      title        = {{T}hermal stability of {G}d{S}c{O}3 and {L}a{L}u{O}3 films
                      prepared by liquid injection {MOCVD}},
      journal      = {Vacuum},
      volume       = {84},
      issn         = {0042-207X},
      address      = {Amsterdam [u.a.]},
      publisher    = {Elsevier Science},
      reportid     = {PreJuSER-5654},
      pages        = {170-173},
      year         = {2010},
      note         = {Record converted from VDB: 12.11.2012},
      abstract     = {We have studied thermal stability of GdScO3 and LaLuO3
                      films prepared by liquid injection metal-organic chemical
                      vapour deposition (MOCVD). In the present work, we report on
                      the characterization of LaLuO3 and GdScO3 thin dielectric
                      films by SIMS and capacitance-voltage (C-V) measurements. In
                      both GdScO3 and LaLuO3 films, SIMS analysis revealed the
                      presence of a silicate interfacial layer. The C-V
                      characteristics were found to be shifted after thermal
                      treatment to negative and positive voltages for GdScO3 and
                      LaLuO3 films, respectively. Furthermore we have observed
                      that LaLuO3 films exhibit C-V characteristics more stable to
                      annealing conditions compared with GdScO3 films. (C) 2009
                      Elsevier Ltd. All rights reserved.},
      keywords     = {J (WoSType)},
      cin          = {IBN-1 / JARA-FIT},
      ddc          = {530},
      cid          = {I:(DE-Juel1)VDB799 / $I:(DE-82)080009_20140620$},
      pnm          = {Grundlagen für zukünftige Informationstechnologien},
      pid          = {G:(DE-Juel1)FUEK412},
      shelfmark    = {Materials Science, Multidisciplinary / Physics, Applied},
      typ          = {PUB:(DE-HGF)16},
      UT           = {WOS:000270625900044},
      doi          = {10.1016/j.vacuum.2009.05.017},
      url          = {https://juser.fz-juelich.de/record/5654},
}