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@ARTICLE{Halder:56913,
author = {Halder, S. and Schneller, T. and Waser, R.},
title = {{M}icrostructure and electrical properties of {B}a{T}i{O}3
and ({B}a,{S}r){T}i{O}3 ferroelectric thin films on nickel
electrodes},
journal = {Journal of sol gel science and technology},
volume = {42},
issn = {0928-0707},
address = {Dordrecht [u.a.]},
publisher = {Springer Science + Business Media B.V},
reportid = {PreJuSER-56913},
pages = {203},
year = {2007},
note = {Record converted from VDB: 12.11.2012},
abstract = {Nickel thin films have been sputtered on standard Si/SiO2
substrates with TiO2 as an adhesive layer. The thermal
stability of these substrates was analyzed. SEM images show
an increase in grain size with annealing temperature. They
were found to be stable till 800 degrees C, beyond which the
nickel layer disintegrated. These substrates were used for
deposition of BaTiO3 and (Ba,Sr)TiO3 dielectric thin films
under a reducing atmosphere. The dielectric thin films were
processed with various pyrolysis and annealing temperatures
in order to optimize the dielectric properties. Increased
pyrolysis temperatures showed an increase in the grain size.
Results on these nickelised substrates were finally compared
with dielectric films deposited on platinized silicon
substrates under identical conditions but crystallized in an
oxygen atmosphere.},
keywords = {J (WoSType)},
cin = {IFF-6 / CNI / JARA-FIT},
ddc = {600},
cid = {I:(DE-Juel1)VDB786 / I:(DE-Juel1)VDB381 /
$I:(DE-82)080009_20140620$},
pnm = {Grundlagen für zukünftige Informationstechnologien /
Kondensierte Materie},
pid = {G:(DE-Juel1)FUEK412 / G:(DE-Juel1)FUEK414},
shelfmark = {Materials Science, Ceramics},
typ = {PUB:(DE-HGF)16},
UT = {WOS:000245899500002},
doi = {10.1007/s10971-007-0763-3},
url = {https://juser.fz-juelich.de/record/56913},
}