%0 Conference Paper
%A Damm, T.
%T Fortschritte Ionenstrahl-Sputteranlage
%M PreJuSER-5710
%D 2002
%Z Record converted from VDB: 12.11.2012
%< BMBF-Leitprojekt  "Magneto-Elektronik
Y2 29 May 2002
M2 Bielefeld, 
%F PUB:(DE-HGF)31
%9 Talk (non conference)
%U https://juser.fz-juelich.de/record/5710