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@INPROCEEDINGS{Damm:5710,
      author       = {Damm, T.},
      title        = {{F}ortschritte {I}onenstrahl-{S}putteranlage},
      reportid     = {PreJuSER-5710},
      year         = {2002},
      note         = {Record converted from VDB: 12.11.2012},
      comment      = {BMBF-Leitprojekt "Magneto-Elektronik},
      booktitle     = {BMBF-Leitprojekt "Magneto-Elektronik},
      month         = {May},
      date          = {2002-05-29},
      organization  = {Bielefeld, 29 May 2002},
      cin          = {IFF-IEE},
      cid          = {I:(DE-Juel1)VDB38},
      pnm          = {Methoden und Systeme der Informationstechnik},
      pid          = {G:(DE-Juel1)FUEK253},
      typ          = {PUB:(DE-HGF)31},
      url          = {https://juser.fz-juelich.de/record/5710},
}