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005     20180211164515.0
024 7 _ |2 DOI
|a 10.1016/j.crysgro.2005.10.032
024 7 _ |2 WOS
|a WOS:000234982100002
037 _ _ |a PreJuSER-57921
041 _ _ |a eng
082 _ _ |a 540
084 _ _ |2 WoS
|a Crystallography
084 _ _ |2 WoS
|a Materials Science, Multidisciplinary
084 _ _ |2 WoS
|a Physics, Applied
100 1 _ |a Amekura, H.
|b 0
|0 P:(DE-HGF)0
245 _ _ |a Formation processes of zinc-oxide nanoparticles by ion implantation combined with thermal oxidation
260 _ _ |a Amsterdam [u.a.]
|b Elsevier
|c 2006
300 _ _ |a 2 - 6
336 7 _ |a Journal Article
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336 7 _ |a Output Types/Journal article
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336 7 _ |a Journal Article
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336 7 _ |a ARTICLE
|2 BibTeX
336 7 _ |a JOURNAL_ARTICLE
|2 ORCID
336 7 _ |a article
|2 DRIVER
440 _ 0 |a Journal of Crystal Growth
|x 0022-0248
|0 3235
|y 1
|v 287
500 _ _ |a Record converted from VDB: 12.11.2012
520 _ _ |a Silica glasses (SiO2) were implanted with Zn+ ions of 60 keV to a fluence of 1.0 x 10(17) ions/cm(2), and were annealed in oxygen gas flow at 700 degrees C for 1 h, to form ZnO nanoparticles (NPs). In as-implanted state, metallic Zn NPs of 10-15 nm in diameter are formed between 10 and 50 nm in depth. NPs are not observed on the surface and down to 10 nm in depth. After the annealing at 700 degrees C for 1 h in oxygen gas, ZnO NPs of similar to 10 nm in diameter are observed around 50 nm in depth. Moreover, droplet-like ZnO NPs larger than 30 nm in diameter grow on the surface of SiO2, substrate. Migration of Zn atoms toward the surface, i.e., shallowing of the depth profile, is observed under the oxygen annealing, while vacuum annealing at the same temperature 700 degrees C does not induce any prominent migration of Zn atoms. Mechanisms of the shallowing and the formation of ZnO NPs are discussed. (c) 2005 Elsevier B.V. All rights reserved.
536 _ _ |a Grundlagen für zukünftige Informationstechnologien
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588 _ _ |a Dataset connected to Web of Science
650 _ 7 |a J
|2 WoSType
653 2 0 |2 Author
|a nanostructures
653 2 0 |2 Author
|a nanomaterials
653 2 0 |2 Author
|a oxides
653 2 0 |2 Author
|a zinc compounds
653 2 0 |2 Author
|a semiconducting II-VI materials
700 1 _ |a Umeda, N.
|b 1
|0 P:(DE-HGF)0
700 1 _ |a Yoshitake, M.
|b 2
|0 P:(DE-HGF)0
700 1 _ |a Kono, K.
|b 3
|0 P:(DE-HGF)0
700 1 _ |a Kishimoto, N.
|b 4
|0 P:(DE-HGF)0
700 1 _ |a Buchal, C.
|b 5
|u FZJ
|0 P:(DE-Juel1)VDB5399
773 _ _ |a 10.1016/j.crysgro.2005.10.032
|g Vol. 287, p. 2 - 6
|p 2 - 6
|q 287<2 - 6
|0 PERI:(DE-600)1466514-1
|t Journal of crystal growth
|v 287
|y 2006
|x 0022-0248
856 7 _ |u http://dx.doi.org/10.1016/j.crysgro.2005.10.032
909 C O |o oai:juser.fz-juelich.de:57921
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913 1 _ |k P42
|v Grundlagen für zukünftige Informationstechnologien
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914 1 _ |a Nachtrag
|y 2006
915 _ _ |0 StatID:(DE-HGF)0010
|a JCR/ISI refereed
920 1 _ |k ISG-1
|l Institut für Halbleiterschichten und Bauelemente
|d 31.12.2006
|g ISG
|0 I:(DE-Juel1)VDB41
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970 _ _ |a VDB:(DE-Juel1)91067
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980 _ _ |a UNRESTRICTED
981 _ _ |a I:(DE-Juel1)PGI-9-20110106


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