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@ARTICLE{Devi:59161,
author = {Devi, A. and Bhakta, R. and Milanov, A. and Hellwig, M. and
Barreca, D. and Tondello, E. and Thomas, R. and Ehrhart, P.
and Winter, M. and Fischer, R.},
title = {{S}ynthesis and characterisation of zirconium–amido
guanidinato complex: a potential precursor for {Z}r{O}2 thin
films},
journal = {Dalton transactions},
volume = {17},
issn = {1477-9226},
address = {London},
publisher = {Soc.},
reportid = {PreJuSER-59161},
pages = {1671 - 1676},
year = {2007},
note = {Record converted from VDB: 12.11.2012},
abstract = {A new zirconium complex,
bis-(ethylmethylamido)-bis-(N,N'-diisopropyl-2-ethylmethylamidoguanidinato)-zirconium(iv)
{[(N(i)Pr)(2)C(NEtMe)](2)Zr(NEtMe)(2)}, was synthesised by
partial replacement of amide ligands with bidentate
guanidinate ligands. The monomeric Zr complex was
characterised by (1)H-NMR, (13)C-NMR, EI-MS, elemental
analysis, and single crystal X-ray diffraction studies. The
thermal properties of the compound was studied by
thermogravimetric and differential thermal analysis
(TG/DTA). The new Zr compound is thermally stable and can be
sublimed quantitatively which renders it promising for thin
film growth using vapor deposition techniques like chemical
vapor deposition (CVD) and atomic layer deposition (ALD).
The use of this complex for CVD of ZrO(2) on Si(100)
substrates was attempted in combination with oxygen as the
oxidant. Stoichiometric ZrO(2) films with preferred
orientation at lower growth temperatures was obtained and
the films were almost carbon free. The preliminary
electrical characterisation of ZrO(2) films showed
encouraging results for possible applications in dielectric
oxide structures.},
keywords = {J (WoSType)},
cin = {IFF-6},
ddc = {540},
cid = {I:(DE-Juel1)VDB786},
pnm = {Kondensierte Materie},
pid = {G:(DE-Juel1)FUEK414},
shelfmark = {Chemistry, Inorganic $\&$ Nuclear},
typ = {PUB:(DE-HGF)16},
pubmed = {pmid:17443259},
UT = {WOS:000245815000005},
doi = {10.1039/b616861b},
url = {https://juser.fz-juelich.de/record/59161},
}