%0 Conference Paper
%A Saleh, R.
%A Munisa, L.
%A Beyer, W.
%T Microstructure and hydrogen stability characterization of amorphous silicon-carbon (a-Si:C:H) films prepared by DC magnetron sputtering
%M PreJuSER-60122
%D 2000
%Z Record converted from VDB: 12.11.2012
%< 8th Asia Pacific Physics Conference (APPC 2000)
Y2 7 Aug 2000
M2 Taipei, 
%F PUB:(DE-HGF)24
%9 Poster
%U https://juser.fz-juelich.de/record/60122